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Spectroscopy solutions for the VUV spectral range



compact VUV spectrometer


Versatile spectrometer covering 80-300nm spectral range with optional monochromator mode.

Best-in-class grating efficiency. Closed-loop grating positioning provides excellent wavelength accuracy. Integrated stray light suppression.



compact high-efficiency flat-field XUV spectrometer


Flat-field spectral coverage of 30-250nm in no-slit configuration for up to 20-times higher efficiency. Compact device covering a broadband spectral range. Integrated stray light suppression for increased signal-to-noise.

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maxLIGHT pro VUV

high-efficiency flat-field VUV spectrometer and beamprofiler


A complete characterization tool for any VUV source, combining
a high-efficiency spectrometer for 40-200nm and a beamprofiler.
Automated switching of spectral region and plug-and-play
extension options to shorter XUV wavelengths give increased
flexibility in the lab.

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