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proLINE
compact EUV source

  • high photon flux in a wide range of wavelengths

  • broadband or monochromatized output

  • highly reliable, long-term stable EUV source

  • compact footprint

proLINE is an easy-to-use plasma-based EUV light source. It provides extremely high photon flux in a variety of wavelength ranges from 1 to 20nm. proLINE is a turn-key source that allows scientists to fully focus on their research. The light source can be complemented by a monochromator or diagnostic spectrometer from our portfolio. 

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proLINE is highly versatile, as two or more outputs are available that can be used in beamlines simultaneously. Also wavelength switching is fast and automated through gas selection and monochromator settings.

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Customized versions, including monochromators, focusing units, and experimental target setups are also available. The proLINE source is available with the X-ray absorption spectroscopy system proXAS, forming a multi-purpose test station. Please contact us to discuss your needs.

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Low maintenance design

proLINE sources enable highly stable operation: less attention to the tool, full focus on research.

The debris-free electrode-less technology enables high system uptime with minimal maintenance. Flux fluctuations under ±1.5% are enabled by careful gas nozzle design and a vibration-isolated setup.

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proLINE: compact EUV light source

specifications

Applications

  • EUV metrology

  • Blue-X studies

  • mask defect inspection

  • resist development

  • EUV microscopy

  • water-window microscopy

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